High-resolution scanning electron microscope; equipped with a high stability Schottky field emission gun and a large specimen chamber (340 mm chamber diameter); Voltage: 100 eV - 30 keV; Resolution: 0.8 nm @ 30 keV, 1.3 nm @ 1 keV; LoVac capable up to 500 Pa chamber pressure. Detectors include standard SE; dedicated backscattering detector for Z-imaging; T1 and T2 through-lens detectors for high-resolution imaging; LoVac SE detector; LoVac backscatter detector; EDAX Si-drift EDX detector for highly efficient recording of elemental maps; EDAX EBSD detector for crystallographic analysis; cathodoluminescence (CL) detector for optically active materials; EBIC amplifier for analysis of defects in semiconductors.