Inspection, Test and Characterization

Check the NanoFab Wiki for the most updated instrumentation.

Optical Microscopy

• Optical Microscopes - General Use
• Fluorescence Microscope (Olympus MX51)
• Deep UV Optical Microscope (Olympus)
• Laser Scanning Confocal M-scope (Olympus LEXT)
• Digital Microscope #7 (Olympus DSX1000)

Electron Microscopy

• SEM 1 (JEOL IT800SHL)
• SEM 2 (JEOL IT800SHL) w/ EDAX
• SEM Sample Coater (Hummer)

Topographical Metrology

• Step Profilometer (KLA Tencor P-7)
• Step Profilometer (DektakXT)
• Atomic Force Microsope (Bruker ICON)
• Laser Scanning Confocal M-scope (Olympus LEXT)

Thickness + Optical Constants

• Ellipsometer (Woollam)
• Optical Film Thickness (Microscope-Mounted Filmetrics F-40-UV)
• Optical Film Thickness & Wafer-Mapping (Filmetrics F50)
• Reflection/Transmission Spectra & Optical Film Thickness (Filmetrics F10-RT-UVX)

Electrical Analysis

• Resistivity Mapper (CDE RESMAP)
• Probe Station & Source/Meter Units
• Photo-emission & Thermal IR Microscope (QFI)

Other Properties

• Film Stress (Tencor Flexus)
• Particle Counts (KLA/Tencor Surfscan)
• Photoluminescence PL Setup (Custom)
• Goniometer (Ramé-Hart A-100)
  • Surface hydrophobicity